SVG Track

From SMFL Wiki

Contents 1 Facts 2 Personnel 3 Tool & Process Information 4 Manuals & Users

Facts

• The SVG 88 is a photoresist coat & develop track.
  • Set up for 100mm round substrates - cassette to cassette handling for coat and develop lines
  • It has a coat track with HMDS vapor prime and softbake hotplate.
  • It has a develop track with post develop hardbake hotplate.

• Chemistry
  • The coat track is set to dispense FujiFilm HPR 504 positive photoresist.
  • The develop track dispenses CD 26 TMAH developer.

Personnel

• Tool Engineer - Dave Yackoff
• Process Engineer - Sean O'Brien

Tool & Process Information

• SVG Track Recipes
• SVG Status

Manuals & Users

SVG Track Manual

SVG Certification Checklist

Certified Users for the SVG Track