Current PVD Targets

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CVC 601

Target Configuration Current Next Change Next Change
Target 1 8" DC Al/Si - General None Scheduled None Scheduled
Target 2 8" DC Mo - Hirschman None Scheduled None Scheduled
Target 3 8" DC W/Ti (90%/10%) None Scheduled None Scheduled
Target 4 4" DC Varies None Scheduled None Scheduled


PE 2400A

Target Configuration Current Next Change Next Change
Target 1 8" RF SiO2 None Scheduled None Scheduled
Target 2 8" RF Si - Simpore None Scheduled None Scheduled
Target 3 8" RF Ni None Scheduled None Scheduled


PE 2400B

Target Configuration Current Next Change Next Change
Target 1 8" DC w/Magnet Cu None Scheduled None Scheduled
Target 2 8" DC w/Magnet ZnO - Bowman None Scheduled None Scheduled
Target 3 8" DC Ta None Scheduled None Scheduled


PE 4400B

Target Configuration Current Next Change Next Change
Target 1 8" RF Ta - Corning None Scheduled None Scheduled
Target 2 8" RF Mo - Corning None Scheduled None Scheduled
Target 3 8" RF Al/Si None Scheduled None Scheduled

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